ORCID "0000-0003-3841-2943" Araştırma Çıktıları | TR-Dizin | WoS | Scopus | PubMed için listeleme
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2D CMUT array based ultrasonic micromanipulation platform
Zeshan, Arooba; Zhang, Xiao; Oralkan, Ömer; Yamaner, Feysel Yalçın (IEEE Computer Society, 2016)In this paper, we designed and simulated a multilayer planar resonator with target frequency of 2.5 MHz which is created over a row/column-addressed 2D CMUT array. We have shown through finite element modeling and simulations ... -
CMUTs on glass with ITO bottom electrodes for improved transparency
Zhang, Xiao; Adelegan, Oluwafemi; Yamaner, Feysel Yalçın; Oralkan, Ömer (IEEE Computer Society, 2016)In this work, we fabricated capacitive micromachined ultrasonic transducers (CMUTs) on a glass substrate with indium tin oxide (ITO) bottom electrodes for improved transparency. A 2-µm vibrating silicon plate was formed ... -
Fabrication of vacuum-sealed capacitive micromachined ultrasonic transducers with through-glass-via interconnects using anodic bonding
Zhang, Xiao; Yamaner, Feysel Yalçın; Oralkan, Ömer (IEEE, 2017)This paper presents a novel fabrication method for vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays that are amenable to 3D integration. This paper demonstrates that MEMS structures can be directly ... -
Focused ultrasound and NXY-059 in experimental cerebral ischemia: A new therapeutic opportunity?
Yuluğ, Burak; Hanoğlu, Lütfü; Yamaner, Feysel Yalçın; Kılıç, Ertuğrul; Schabitz, Wolf Rudiger (Bentham Science Publishers, 2016)troke is the third leading cause of morbidity and mortality worldwide. Many deleterious cellular pathways have been proposed to explain the molecular pathogenesis of this clinically devastating disease [1, 2]. The ... -
A MEMS T/R switch embedded in CMUT structure for ultrasound imaging frontends
Zhang, Xiao; Zeshan, Arooba; Adelegan, Oluwafemi Joel; Yamaner, Feysel Yalçın; Oralkan, Ömer (IEEE Computer Society, 2016)This paper describes a novel MEMS transmit/ receive (T/R) switch that could be embedded in the general structure of a capacitive micromachined ultrasonic transducer (CMUT). A MEMS switch and a CMUT element were fabricated ... -
A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding
Yamaner, Feysel; Zhang, Xiao; Oralkan, Ömer (Institute of Electrical and Electronics Engineers, 2015)This paper introduces a simplified fabrication method for vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using anodic bonding. Anodic bonding provides the established advantages of wafer-bonding-based ...