2D CMUT array based ultrasonic micromanipulation platform
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CitationZeshan, A., Zhang, X., Oralkan, Ö. ve Yamaner, F. Y. (2016). 2D CMUT array based ultrasonic micromanipulation platform. IEEE International Ultrasonics Symposium (IUS), Tours, France, September 18-21, 2016. https://dx.doi.org/10.1109/ULTSYM.2016.7728665
In this paper, we designed and simulated a multilayer planar resonator with target frequency of 2.5 MHz which is created over a row/column-addressed 2D CMUT array. We have shown through finite element modeling and simulations that a particle can be trapped and manipulated both in lateral and axial directions inside the fluid channel by activating CMUT elements; And calculated acoustic radiation force acting on a polystyrene particle of 10-µm radius. We fabricated a 32×32-element row/column-addressed 2D CMUT array on a glass substrate using anodic bonding technology. This approach provides a cost effective and easily implementable solution to micro-particle trapping and handling.