Maskless lithography with holographic feedback for the fabrication of optical elements

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dc.authorid0000-0003-0176-8807
dc.contributor.authorGürcan, Tolga
dc.contributor.authorToy, Muhammed Fatih
dc.date.accessioned2022-07-18T12:21:49Z
dc.date.available2022-07-18T12:21:49Z
dc.date.issued2022
dc.departmentİstanbul Medipol Üniversitesi, Mühendislik ve Doğa Bilimleri Fakültesi, Biyomedikal Mühendisliği Bölümü
dc.departmentİstanbul Medipol Üniversitesi, Rektörlük, Sağlık Bilim ve Teknolojileri Araştırma Enstitüsü
dc.description.abstractPhotolithography has become a powerful tool in the fabrication of micro-optical elements following the advancements in grayscale approaches. However, hitting tight design tolerance goals require precise control of all parameters such as temperature, resist nonlinearity or preventing vignetting. In this work we took an alternative route to these problems by combining maskless lithography with digital holography. Addition of digital holography enables the use of feedback by measuring the quantitative phase of specimen near real time and in situ nondestructively. After each near UV exposure, phase retardation map of exposed photopolymer is measured with digital holography part of the system. Any deviation from target phase is corrected by changing the pattern displayed on the mask. We showed that the proposed method reduces the standard deviation of resulting phase compared to traditional one-shot grayscale lithography. It also does not require any precalibration of photoresist and relaxes the constraints for uniform UV illumination in sample plane.
dc.description.sponsorshipCity of Strasbourg ; CNRS ; iCube ; IdEx University of Strasbourg ; The Society of Photo-Optical Instrumentation Engineers (SPIE) ; Universite de Strasbourgen_US
dc.description.sponsorshipTurkish Academy of Sciencesen_US
dc.identifier.citationGürcan, T. ve Toy, M. F. (2022). Maskless lithography with holographic feedback for the fabrication of optical elements. 3D Printed Optics and Additive Photonic Manufacturing III. Virtual, Online, 9-20 May 2022. http://doi.org/10.1117/12.2621546
dc.identifier.doi10.1117/12.2621546
dc.identifier.isbn9781510651463
dc.identifier.issn0277-786X
dc.identifier.issn1996-756X
dc.identifier.scopus2-s2.0-85133129252
dc.identifier.scopusqualityN/A
dc.identifier.urihttp://doi.org/10.1117/12.2621546
dc.identifier.urihttps://hdl.handle.net/20.500.12511/9579
dc.identifier.volume12135
dc.identifier.wos000838072400007en_US
dc.identifier.wosqualityN/A
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.institutionauthorToy, Muhammed Fatih
dc.language.isoen
dc.publisherSPIE
dc.relation.ispartof3D Printed Optics and Additive Photonic Manufacturing IIIen_US
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanı
dc.relation.tubitakinfo:eu-repo/grantAgreement/TUBITAK/SOBAG/115C067
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.subjectDigital Holographic Microscopy
dc.subjectGrayscale Lithography
dc.subjectMaskless Lithography
dc.subjectMicro Fabrication
dc.subjectMicro-Optics
dc.subjectUV Lithography
dc.titleMaskless lithography with holographic feedback for the fabrication of optical elements
dc.typeConference Object

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