Ara
Toplam kayıt 3, listelenen: 1-3
2D CMUT array based ultrasonic micromanipulation platform
(IEEE Computer Society, 2016)
In this paper, we designed and simulated a multilayer planar resonator with target frequency of 2.5 MHz which is created over a row/column-addressed 2D CMUT array. We have shown through finite element modeling and simulations ...
A MEMS T/R switch embedded in CMUT structure for ultrasound imaging frontends
(IEEE Computer Society, 2016)
This paper describes a novel MEMS transmit/ receive (T/R) switch that could be embedded in the general structure of a capacitive micromachined ultrasonic transducer (CMUT). A MEMS switch and a CMUT element were fabricated ...
CMUTs on glass with ITO bottom electrodes for improved transparency
(IEEE Computer Society, 2016)
In this work, we fabricated capacitive micromachined ultrasonic transducers (CMUTs) on a glass substrate with indium tin oxide (ITO) bottom electrodes for improved transparency. A 2-µm vibrating silicon plate was formed ...