CMUTs on glass with ITO bottom electrodes for improved transparency

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dc.authorid0000-0003-3841-2943
dc.contributor.authorZhang, Xiao
dc.contributor.authorAdelegan, Oluwafemi
dc.contributor.authorYamaner, Feysel Yalçın
dc.contributor.authorOralkan, Ömer
dc.date.accessioned10.07.201910:49:13
dc.date.accessioned2019-07-10T19:36:52Z
dc.date.available10.07.201910:49:14
dc.date.available2019-07-10T19:36:52Z
dc.date.issued2016
dc.departmentİstanbul Medipol Üniversitesi, Mühendislik ve Doğa Bilimleri Fakültesi, Elektrik ve Elektronik Mühendisliği Bölümü
dc.description.abstractIn this work, we fabricated capacitive micromachined ultrasonic transducers (CMUTs) on a glass substrate with indium tin oxide (ITO) bottom electrodes for improved transparency. A 2-µm vibrating silicon plate was formed by anodic bonding. The fabrication process requires three masks. The fabricated devices show approximately 300% improvement of optical transmission in the visible to NIR wavelength range (400 nm - 1000 nm) compared to the devices with chromium/gold (Cr/Au) bottom electrodes. The measured static surface profile confirmed that the fabricated devices are vacuum-sealed. The electrical input impedance measurement shows the device has a resonant frequency of 4.75 MHz at 30-V DC voltage. The series resistance of the device is ~1 k?, which is mainly due to the ITO bottom electrode connections. Using a full bottom electrode or using parallel connections to the pads could reduce the resistance. The main hurdle for the transparency at shorter wavelength range is the 2-µm silicon plate. The transfer-matrix model shows the transparency could be improved to -80% across the measured spectrum, if silicon is replaced with a more transparent plate material such as ITO or silicon nitride.
dc.description.sponsorshipIEEEen_US
dc.identifier.citationZhang, X., Adelegan, O., Yamaner, F. Y. ve Oralkan, Ö. (2016). CMUTs on glass with ITO bottom electrodes for improved transparency. IEEE International Ultrasonics Symposium (IUS), Tours, France, September 18-21, 2016. https://dx.doi.org/10.1109/ULTSYM.2016.7728671
dc.identifier.doi10.1109/ULTSYM.2016.7728671
dc.identifier.isbn9781467398978
dc.identifier.issn1948-5719
dc.identifier.scopusqualityN/A
dc.identifier.urihttps://hdl.handle.net/20.500.12511/1275
dc.identifier.urihttps://dx.doi.org/10.1109/ULTSYM.2016.7728671
dc.identifier.wosqualityN/A
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherIEEE Computer Society
dc.relation.ispartofIEEE International Ultrasonics Symposium (IUS)en_US
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/openAccess
dc.subjectAnodic bonding
dc.subjectCMUT
dc.subjectGlass
dc.subjectITO
dc.subjectTransparency
dc.titleCMUTs on glass with ITO bottom electrodes for improved transparency
dc.typeConference Object

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