A MEMS T/R switch embedded in CMUT structure for ultrasound imaging frontends

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dc.authorid0000-0001-7300-5804
dc.authorid0000-0003-3841-2943
dc.contributor.authorZhang, Xiao
dc.contributor.authorZeshan, Arooba
dc.contributor.authorAdelegan, Oluwafemi Joel
dc.contributor.authorYamaner, Feysel Yalçın
dc.contributor.authorOralkan, Ömer
dc.date.accessioned10.07.201910:49:13
dc.date.accessioned2019-07-10T19:36:52Z
dc.date.available10.07.201910:49:14
dc.date.available2019-07-10T19:36:52Z
dc.date.issued2016
dc.departmentİstanbul Medipol Üniversitesi, Mühendislik ve Doğa Bilimleri Fakültesi, Elektrik ve Elektronik Mühendisliği Bölümü
dc.description.abstractThis paper describes a novel MEMS transmit/ receive (T/R) switch that could be embedded in the general structure of a capacitive micromachined ultrasonic transducer (CMUT). A MEMS switch and a CMUT element were fabricated side by side using an anodic-bonding-based fabrication process. The plates of the CMUT and the membrane-type switch were formed at the same step by anodic bonding. A single switch was tested in air for preliminary characterization. Vacuum-sealing of the switch cell was confirmed by an atmospheric deflection measurement. The switch was then biased at 59-V DC voltage and turned on and off by applying a 1-kHz, 5-Vpp square wave to the control terminal while a 1-MHz, 300-mVpp sinusoidal signal was applied at the RF input. The signal measured at the RF output demonstrates the basic switching behavior with a switch series resistance of 124 ?. This work is important for the ultrasound imaging system efficiency and could significantly ease the high-voltage requirements of frontend circuits.
dc.description.sponsorshipNational Institutes of Health: EB021010en_US
dc.identifier.citationZhang, X., Zeshan, A., Adelegan, O. J., Yamaner, F. Y. ve Oralkan, Ö. (2016). A MEMS T/R switch embedded in CMUT structure for ultrasound imaging frontends. IEEE International Ultrasonics Symposium (IUS). Tours, France, September 18-21, 2016. https://dx.doi.org/10.1109/ULTSYM.2016.7728635
dc.identifier.doi10.1109/ULTSYM.2016.7728635
dc.identifier.isbn9781467398978
dc.identifier.issn1948-5719
dc.identifier.scopusqualityN/A
dc.identifier.urihttps://hdl.handle.net/20.500.12511/1276
dc.identifier.urihttps://dx.doi.org/10.1109/ULTSYM.2016.7728635
dc.identifier.wosqualityN/A
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherIEEE Computer Society
dc.relation.ispartofIEEE International Ultrasonics Symposium (IUS)en_US
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/openAccess
dc.subjectAnodic bonding
dc.subjectCMUT
dc.subjectGlass
dc.subjectMEMS switch
dc.subjectUltrasound system
dc.titleA MEMS T/R switch embedded in CMUT structure for ultrasound imaging frontends
dc.typeConference Object

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