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dc.contributor.authorGürcan, Tolga
dc.contributor.authorToy, Muhammed Fatih
dc.date.accessioned2022-07-18T12:21:49Z
dc.date.available2022-07-18T12:21:49Z
dc.date.issued2022en_US
dc.identifier.citationGürcan, T. ve Toy, M. F. (2022). Maskless lithography with holographic feedback for the fabrication of optical elements. 3D Printed Optics and Additive Photonic Manufacturing III. Virtual, Online, 9-20 May 2022. http://doi.org/10.1117/12.2621546en_US
dc.identifier.isbn9781510651463
dc.identifier.issn0277-786X
dc.identifier.issn1996-756X
dc.identifier.urihttp://doi.org/10.1117/12.2621546
dc.identifier.urihttps://hdl.handle.net/20.500.12511/9579
dc.description.abstractPhotolithography has become a powerful tool in the fabrication of micro-optical elements following the advancements in grayscale approaches. However, hitting tight design tolerance goals require precise control of all parameters such as temperature, resist nonlinearity or preventing vignetting. In this work we took an alternative route to these problems by combining maskless lithography with digital holography. Addition of digital holography enables the use of feedback by measuring the quantitative phase of specimen near real time and in situ nondestructively. After each near UV exposure, phase retardation map of exposed photopolymer is measured with digital holography part of the system. Any deviation from target phase is corrected by changing the pattern displayed on the mask. We showed that the proposed method reduces the standard deviation of resulting phase compared to traditional one-shot grayscale lithography. It also does not require any precalibration of photoresist and relaxes the constraints for uniform UV illumination in sample plane.en_US
dc.description.sponsorshipCity of Strasbourg ; CNRS ; iCube ; IdEx University of Strasbourg ; The Society of Photo-Optical Instrumentation Engineers (SPIE) ; Universite de Strasbourgen_US
dc.description.sponsorshipTurkish Academy of Sciencesen_US
dc.language.isoengen_US
dc.publisherSPIEen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectDigital Holographic Microscopyen_US
dc.subjectGrayscale Lithographyen_US
dc.subjectMaskless Lithographyen_US
dc.subjectMicro Fabricationen_US
dc.subjectMicro-Opticsen_US
dc.subjectUV Lithographyen_US
dc.titleMaskless lithography with holographic feedback for the fabrication of optical elementsen_US
dc.typeconferenceObjecten_US
dc.relation.ispartof3D Printed Optics and Additive Photonic Manufacturing IIIen_US
dc.departmentİstanbul Medipol Üniversitesi, Mühendislik ve Doğa Bilimleri Fakültesi, Biyomedikal Mühendisliği Bölümüen_US
dc.departmentİstanbul Medipol Üniversitesi, Rektörlük, Sağlık Bilim ve Teknolojileri Araştırma Enstitüsüen_US
dc.authorid0000-0003-0176-8807en_US
dc.identifier.volume12135en_US
dc.relation.tubitakinfo:eu-repo/grantAgreement/TUBITAK/SOBAG/115C067
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanıen_US
dc.identifier.doi10.1117/12.2621546en_US
dc.institutionauthorToy, Muhammed Fatih
dc.identifier.wos000838072400007en_US
dc.identifier.scopus2-s2.0-85133129252en_US


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