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A MEMS T/R switch embedded in CMUT structure for ultrasound imaging frontends
(IEEE Computer Society, 2016)
This paper describes a novel MEMS transmit/ receive (T/R) switch that could be embedded in the general structure of a capacitive micromachined ultrasonic transducer (CMUT). A MEMS switch and a CMUT element were fabricated ...
CMUTs on glass with ITO bottom electrodes for improved transparency
(IEEE Computer Society, 2016)
In this work, we fabricated capacitive micromachined ultrasonic transducers (CMUTs) on a glass substrate with indium tin oxide (ITO) bottom electrodes for improved transparency. A 2-µm vibrating silicon plate was formed ...