Konu "Micro Fabrication" için Biomedical Engineering listeleme
Toplam kayıt 1, listelenen: 1-1
-
Maskless lithography with holographic feedback for the fabrication of optical elements
(SPIE, 2022)Photolithography has become a powerful tool in the fabrication of micro-optical elements following the advancements in grayscale approaches. However, hitting tight design tolerance goals require precise control of all ...