Konu "Capacitive Micromachined Ultrasonic Transducer (CMUT)" için Makale Koleksiyonu listeleme
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Fabrication of vacuum-sealed capacitive micromachined ultrasonic transducers with through-glass-via interconnects using anodic bonding
(IEEE, 2017)This paper presents a novel fabrication method for vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays that are amenable to 3D integration. This paper demonstrates that MEMS structures can be directly ...