Yazar "Zhang, Xiao" için Makale Koleksiyonu listeleme
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Fabrication of vacuum-sealed capacitive micromachined ultrasonic transducers with through-glass-via interconnects using anodic bonding
Zhang, Xiao; Yamaner, Feysel Yalçın; Oralkan, Ömer (IEEE, 2017)This paper presents a novel fabrication method for vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays that are amenable to 3D integration. This paper demonstrates that MEMS structures can be directly ... -
A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding
Yamaner, Feysel; Zhang, Xiao; Oralkan, Ömer (Institute of Electrical and Electronics Engineers, 2015)This paper introduces a simplified fabrication method for vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using anodic bonding. Anodic bonding provides the established advantages of wafer-bonding-based ...