dc.contributor.author | Zhang, Xiao | |
dc.contributor.author | Zeshan, Arooba | |
dc.contributor.author | Adelegan, Oluwafemi Joel | |
dc.contributor.author | Yamaner, Feysel Yalçın | |
dc.contributor.author | Oralkan, Ömer | |
dc.date.accessioned | 10.07.201910:49:13 | |
dc.date.accessioned | 2019-07-10T19:36:52Z | |
dc.date.available | 10.07.201910:49:14 | |
dc.date.available | 2019-07-10T19:36:52Z | |
dc.date.issued | 2016 | en_US |
dc.identifier.citation | Zhang, X., Zeshan, A., Adelegan, O. J., Yamaner, F. Y. ve Oralkan, Ö. (2016). A MEMS T/R switch embedded in CMUT structure for ultrasound imaging frontends. IEEE International Ultrasonics Symposium (IUS). Tours, France, September 18-21, 2016. https://dx.doi.org/10.1109/ULTSYM.2016.7728635 | en_US |
dc.identifier.isbn | 9781467398978 | |
dc.identifier.issn | 1948-5719 | |
dc.identifier.uri | https://hdl.handle.net/20.500.12511/1276 | |
dc.identifier.uri | https://dx.doi.org/10.1109/ULTSYM.2016.7728635 | |
dc.description.abstract | This paper describes a novel MEMS transmit/ receive (T/R) switch that could be embedded in the general structure of a capacitive micromachined ultrasonic transducer (CMUT). A MEMS switch and a CMUT element were fabricated side by side using an anodic-bonding-based fabrication process. The plates of the CMUT and the membrane-type switch were formed at the same step by anodic bonding. A single switch was tested in air for preliminary characterization. Vacuum-sealing of the switch cell was confirmed by an atmospheric deflection measurement. The switch was then biased at 59-V DC voltage and turned on and off by applying a 1-kHz, 5-Vpp square wave to the control terminal while a 1-MHz, 300-mVpp sinusoidal signal was applied at the RF input. The signal measured at the RF output demonstrates the basic switching behavior with a switch series resistance of 124 ?. This work is important for the ultrasound imaging system efficiency and could significantly ease the high-voltage requirements of frontend circuits. | en_US |
dc.description.sponsorship | National Institutes of Health: EB021010 | en_US |
dc.language.iso | eng | en_US |
dc.publisher | IEEE Computer Society | en_US |
dc.rights | info:eu-repo/semantics/openAccess | en_US |
dc.subject | Anodic bonding | en_US |
dc.subject | CMUT | en_US |
dc.subject | Glass | en_US |
dc.subject | MEMS switch | en_US |
dc.subject | Ultrasound system | en_US |
dc.title | A MEMS T/R switch embedded in CMUT structure for ultrasound imaging frontends | en_US |
dc.type | conferenceObject | en_US |
dc.relation.ispartof | IEEE International Ultrasonics Symposium (IUS) | en_US |
dc.department | İstanbul Medipol Üniversitesi, Mühendislik ve Doğa Bilimleri Fakültesi, Elektrik ve Elektronik Mühendisliği Bölümü | en_US |
dc.authorid | 0000-0001-7300-5804 | en_US |
dc.authorid | 0000-0003-3841-2943 | en_US |
dc.relation.publicationcategory | Konferans Öğesi - Uluslararası - Kurum Öğretim Elemanı | en_US |
dc.identifier.doi | 10.1109/ULTSYM.2016.7728635 | en_US |