dc.contributor.author | Gürcan, Tolga | |
dc.contributor.author | Toy, Muhammed Fatih | |
dc.date.accessioned | 2022-07-18T12:21:49Z | |
dc.date.available | 2022-07-18T12:21:49Z | |
dc.date.issued | 2022 | en_US |
dc.identifier.citation | Gürcan, T. ve Toy, M. F. (2022). Maskless lithography with holographic feedback for the fabrication of optical elements. 3D Printed Optics and Additive Photonic Manufacturing III. Virtual, Online, 9-20 May 2022. http://doi.org/10.1117/12.2621546 | en_US |
dc.identifier.isbn | 9781510651463 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.issn | 1996-756X | |
dc.identifier.uri | http://doi.org/10.1117/12.2621546 | |
dc.identifier.uri | https://hdl.handle.net/20.500.12511/9579 | |
dc.description.abstract | Photolithography has become a powerful tool in the fabrication of micro-optical elements following the advancements in grayscale approaches. However, hitting tight design tolerance goals require precise control of all parameters such as temperature, resist nonlinearity or preventing vignetting. In this work we took an alternative route to these problems by combining maskless lithography with digital holography. Addition of digital holography enables the use of feedback by measuring the quantitative phase of specimen near real time and in situ nondestructively. After each near UV exposure, phase retardation map of exposed photopolymer is measured with digital holography part of the system. Any deviation from target phase is corrected by changing the pattern displayed on the mask. We showed that the proposed method reduces the standard deviation of resulting phase compared to traditional one-shot grayscale lithography. It also does not require any precalibration of photoresist and relaxes the constraints for uniform UV illumination in sample plane. | en_US |
dc.description.sponsorship | City of Strasbourg ; CNRS ; iCube ; IdEx University of Strasbourg ; The Society of Photo-Optical Instrumentation Engineers (SPIE) ; Universite de Strasbourg | en_US |
dc.description.sponsorship | Turkish Academy of Sciences | en_US |
dc.language.iso | eng | en_US |
dc.publisher | SPIE | en_US |
dc.rights | info:eu-repo/semantics/closedAccess | en_US |
dc.subject | Digital Holographic Microscopy | en_US |
dc.subject | Grayscale Lithography | en_US |
dc.subject | Maskless Lithography | en_US |
dc.subject | Micro Fabrication | en_US |
dc.subject | Micro-Optics | en_US |
dc.subject | UV Lithography | en_US |
dc.title | Maskless lithography with holographic feedback for the fabrication of optical elements | en_US |
dc.type | conferenceObject | en_US |
dc.relation.ispartof | 3D Printed Optics and Additive Photonic Manufacturing III | en_US |
dc.department | İstanbul Medipol Üniversitesi, Mühendislik ve Doğa Bilimleri Fakültesi, Biyomedikal Mühendisliği Bölümü | en_US |
dc.department | İstanbul Medipol Üniversitesi, Rektörlük, Sağlık Bilim ve Teknolojileri Araştırma Enstitüsü | en_US |
dc.authorid | 0000-0003-0176-8807 | en_US |
dc.identifier.volume | 12135 | en_US |
dc.relation.tubitak | info:eu-repo/grantAgreement/TUBITAK/SOBAG/115C067 | |
dc.relation.publicationcategory | Konferans Öğesi - Uluslararası - Kurum Öğretim Elemanı | en_US |
dc.identifier.doi | 10.1117/12.2621546 | en_US |
dc.institutionauthor | Toy, Muhammed Fatih | |
dc.identifier.wos | 000838072400007 | en_US |
dc.identifier.scopus | 2-s2.0-85133129252 | en_US |