Yayıncı "Institute of Electrical and Electronics Engineers" PubMed İndeksli Yayınlar Koleksiyonu için listeleme
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A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding
(Institute of Electrical and Electronics Engineers, 2015)This paper introduces a simplified fabrication method for vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using anodic bonding. Anodic bonding provides the established advantages of wafer-bonding-based ...