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Toplam kayıt 5, listelenen: 1-5
2D CMUT array based ultrasonic micromanipulation platform
(IEEE Computer Society, 2016)
In this paper, we designed and simulated a multilayer planar resonator with target frequency of 2.5 MHz which is created over a row/column-addressed 2D CMUT array. We have shown through finite element modeling and simulations ...
A MEMS T/R switch embedded in CMUT structure for ultrasound imaging frontends
(IEEE Computer Society, 2016)
This paper describes a novel MEMS transmit/ receive (T/R) switch that could be embedded in the general structure of a capacitive micromachined ultrasonic transducer (CMUT). A MEMS switch and a CMUT element were fabricated ...
CMUTs on glass with ITO bottom electrodes for improved transparency
(IEEE Computer Society, 2016)
In this work, we fabricated capacitive micromachined ultrasonic transducers (CMUTs) on a glass substrate with indium tin oxide (ITO) bottom electrodes for improved transparency. A 2-µm vibrating silicon plate was formed ...
Design of high-frequency broadband CMUT arrays
(Institute of Electrical and Electronics Engineers, 2015)
In this work we demonstrate a high-frequency (29-MHz) broadband (100% FBW) CMUT 1D array. The devices are fabricated using anodic bonding with only three photolithography steps. We also discuss the design guidelines for ...
Fabrication of capacitive micromachined ultrasonic transducers with through-glass-via interconnects
(Institute of Electrical and Electronics Engineers, 2015)
This paper introduces a novel fabrication method for capacitive micromachined ultrasonic transducer (CMUT) arrays amenable to 3D integration. The work demonstrates that MEMS structures can be directly built on a through-glass-via ...