Konu "Glass" için Bildiri Koleksiyonu listeleme
Toplam kayıt 4, listelenen: 1-4
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CMUTs on glass with ITO bottom electrodes for improved transparency
(IEEE Computer Society, 2016)In this work, we fabricated capacitive micromachined ultrasonic transducers (CMUTs) on a glass substrate with indium tin oxide (ITO) bottom electrodes for improved transparency. A 2-µm vibrating silicon plate was formed ... -
Design of high-frequency broadband CMUT arrays
(Institute of Electrical and Electronics Engineers, 2015)In this work we demonstrate a high-frequency (29-MHz) broadband (100% FBW) CMUT 1D array. The devices are fabricated using anodic bonding with only three photolithography steps. We also discuss the design guidelines for ... -
Fabrication of capacitive micromachined ultrasonic transducers with through-glass-via interconnects
(Institute of Electrical and Electronics Engineers, 2015)This paper introduces a novel fabrication method for capacitive micromachined ultrasonic transducer (CMUT) arrays amenable to 3D integration. The work demonstrates that MEMS structures can be directly built on a through-glass-via ... -
A MEMS T/R switch embedded in CMUT structure for ultrasound imaging frontends
(IEEE Computer Society, 2016)This paper describes a novel MEMS transmit/ receive (T/R) switch that could be embedded in the general structure of a capacitive micromachined ultrasonic transducer (CMUT). A MEMS switch and a CMUT element were fabricated ...