dc.contributor.author | Zhang, Xiao | |
dc.contributor.author | Adelegan, Oluwafemi | |
dc.contributor.author | Yamaner, Feysel Yalçın | |
dc.contributor.author | Oralkan, Ömer | |
dc.date.accessioned | 10.07.201910:49:13 | |
dc.date.accessioned | 2019-07-10T19:36:52Z | |
dc.date.available | 10.07.201910:49:14 | |
dc.date.available | 2019-07-10T19:36:52Z | |
dc.date.issued | 2016 | en_US |
dc.identifier.citation | Zhang, X., Adelegan, O., Yamaner, F. Y. ve Oralkan, Ö. (2016). CMUTs on glass with ITO bottom electrodes for improved transparency. IEEE International Ultrasonics Symposium (IUS), Tours, France, September 18-21, 2016. https://dx.doi.org/10.1109/ULTSYM.2016.7728671 | en_US |
dc.identifier.isbn | 9781467398978 | |
dc.identifier.issn | 1948-5719 | |
dc.identifier.uri | https://hdl.handle.net/20.500.12511/1275 | |
dc.identifier.uri | https://dx.doi.org/10.1109/ULTSYM.2016.7728671 | |
dc.description.abstract | In this work, we fabricated capacitive micromachined ultrasonic transducers (CMUTs) on a glass substrate with indium tin oxide (ITO) bottom electrodes for improved transparency. A 2-µm vibrating silicon plate was formed by anodic bonding. The fabrication process requires three masks. The fabricated devices show approximately 300% improvement of optical transmission in the visible to NIR wavelength range (400 nm - 1000 nm) compared to the devices with chromium/gold (Cr/Au) bottom electrodes. The measured static surface profile confirmed that the fabricated devices are vacuum-sealed. The electrical input impedance measurement shows the device has a resonant frequency of 4.75 MHz at 30-V DC voltage. The series resistance of the device is ~1 k?, which is mainly due to the ITO bottom electrode connections. Using a full bottom electrode or using parallel connections to the pads could reduce the resistance. The main hurdle for the transparency at shorter wavelength range is the 2-µm silicon plate. The transfer-matrix model shows the transparency could be improved to -80% across the measured spectrum, if silicon is replaced with a more transparent plate material such as ITO or silicon nitride. | en_US |
dc.description.sponsorship | IEEE | en_US |
dc.language.iso | eng | en_US |
dc.publisher | IEEE Computer Society | en_US |
dc.rights | info:eu-repo/semantics/openAccess | en_US |
dc.subject | Anodic bonding | en_US |
dc.subject | CMUT | en_US |
dc.subject | Glass | en_US |
dc.subject | ITO | en_US |
dc.subject | Transparency | en_US |
dc.title | CMUTs on glass with ITO bottom electrodes for improved transparency | en_US |
dc.type | conferenceObject | en_US |
dc.relation.ispartof | IEEE International Ultrasonics Symposium (IUS) | en_US |
dc.department | İstanbul Medipol Üniversitesi, Mühendislik ve Doğa Bilimleri Fakültesi, Elektrik ve Elektronik Mühendisliği Bölümü | en_US |
dc.authorid | 0000-0003-3841-2943 | en_US |
dc.relation.publicationcategory | Konferans Öğesi - Uluslararası - Kurum Öğretim Elemanı | en_US |
dc.identifier.doi | 10.1109/ULTSYM.2016.7728671 | en_US |