Browsing by Author "Yamanery, F. Yalçın"

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Fabrication of capacitive micromachined ultrasonic transducers with through-glass-via interconnects

Zhang, Xiao; Yamanery, F. Yalçın; Oralkan, Ömer (Institute of Electrical and Electronics Engineers, 2015)

This paper introduces a novel fabrication method for capacitive micromachined ultrasonic transducer (CMUT) arrays amenable to 3D integration. The work demonstrates that MEMS structures can be directly built on a through-glass-via ...