Browsing by Author "Yamaner, Feysel"

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A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding

Yamaner, Feysel; Zhang, Xiao; Oralkan, Ömer (Institute of Electrical and Electronics Engineers, 2015)

This paper introduces a simplified fabrication method for vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using anodic bonding. Anodic bonding provides the established advantages of wafer-bonding-based ...