Browsing by Author "Oralkan, Ömer"
Now showing items 1-7 of 7
-
2D CMUT array based ultrasonic micromanipulation platform
Zeshan, Arooba; Zhang, Xiao; Oralkan, Ömer; Yamaner, Feysel Yalçın (IEEE Computer Society, 2016)In this paper, we designed and simulated a multilayer planar resonator with target frequency of 2.5 MHz which is created over a row/column-addressed 2D CMUT array. We have shown through finite element modeling and simulations ... -
CMUTs on glass with ITO bottom electrodes for improved transparency
Zhang, Xiao; Adelegan, Oluwafemi; Yamaner, Feysel Yalçın; Oralkan, Ömer (IEEE Computer Society, 2016)In this work, we fabricated capacitive micromachined ultrasonic transducers (CMUTs) on a glass substrate with indium tin oxide (ITO) bottom electrodes for improved transparency. A 2-µm vibrating silicon plate was formed ... -
Design of high-frequency broadband CMUT arrays
Zhang, Xiao; Yamanery, Feysel Yalçın; Adelegan, Oluwafemi Joel; Oralkan, Ömer (Institute of Electrical and Electronics Engineers, 2015)In this work we demonstrate a high-frequency (29-MHz) broadband (100% FBW) CMUT 1D array. The devices are fabricated using anodic bonding with only three photolithography steps. We also discuss the design guidelines for ... -
Fabrication of capacitive micromachined ultrasonic transducers with through-glass-via interconnects
Zhang, Xiao; Yamanery, F. Yalçın; Oralkan, Ömer (Institute of Electrical and Electronics Engineers, 2015)This paper introduces a novel fabrication method for capacitive micromachined ultrasonic transducer (CMUT) arrays amenable to 3D integration. The work demonstrates that MEMS structures can be directly built on a through-glass-via ... -
Fabrication of vacuum-sealed capacitive micromachined ultrasonic transducers with through-glass-via interconnects using anodic bonding
Zhang, Xiao; Yamaner, Feysel Yalçın; Oralkan, Ömer (IEEE, 2017)This paper presents a novel fabrication method for vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays that are amenable to 3D integration. This paper demonstrates that MEMS structures can be directly ... -
A MEMS T/R switch embedded in CMUT structure for ultrasound imaging frontends
Zhang, Xiao; Zeshan, Arooba; Adelegan, Oluwafemi Joel; Yamaner, Feysel Yalçın; Oralkan, Ömer (IEEE Computer Society, 2016)This paper describes a novel MEMS transmit/ receive (T/R) switch that could be embedded in the general structure of a capacitive micromachined ultrasonic transducer (CMUT). A MEMS switch and a CMUT element were fabricated ... -
A three-mask process for fabricating vacuum-sealed capacitive micromachined ultrasonic transducers using anodic bonding
Yamaner, Feysel; Zhang, Xiao; Oralkan, Ömer (Institute of Electrical and Electronics Engineers, 2015)This paper introduces a simplified fabrication method for vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using anodic bonding. Anodic bonding provides the established advantages of wafer-bonding-based ...
