Browsing by Author "Adelegan, Oluwafemi"

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CMUTs on glass with ITO bottom electrodes for improved transparency

Zhang, Xiao; Adelegan, Oluwafemi; Yamaner, Feysel Yalçın; Oralkan, Ömer (IEEE Computer Society, 2016)

In this work, we fabricated capacitive micromachined ultrasonic transducers (CMUTs) on a glass substrate with indium tin oxide (ITO) bottom electrodes for improved transparency. A 2-µm vibrating silicon plate was formed ...